Semiconductor package and manufacturing method thereof

ABSTRACT

A manufacturing method of a semiconductor package includes at least the following steps. A rear surface of a semiconductor die is attached to a patterned dielectric layer of a first redistribution structure through a die attach material, where a thickness of a portion of the die attach material filling a gap between the rear surface of the semiconductor die and a recessed area of the patterned dielectric layer is greater than a thickness of another portion of the die attach material interposed between the rear surface of the semiconductor die and a non-recessed area of the patterned dielectric layer. An insulating encapsulant is formed on the patterned dielectric layer of the first redistribution structure to cover the semiconductor die and the die attach material. Other methods for forming a semiconductor package are also provided.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 16/691,518, filed onNov. 21, 2019. The prior application Ser. No. 16/691,518 is acontinuation application of and claims the priority benefits of U.S.application Ser. No. 15/964,087, filed on Apr. 27, 2018. The entirety ofeach of the above-mentioned patent applications is hereby incorporatedby reference herein and made a part of this specification.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic devices. As the demand for shrinking electronic devices hasgrown, a need for smaller and more creative packaging techniques ofsemiconductor dies has emerged. Thus, packages such as wafer levelpackaging (WLP) have begun to be developed, in which integrated circuits(ICs) are placed on a carrier having connectors for making connection tothe ICs and other electrical components. In an attempt to furtherincrease circuit density, three-dimensional (3D) ICs have also beendeveloped, in which multiple ICs are bonded together electricalconnections are formed between the dies and contact pads on a substrate.These relatively new types of packaging for semiconductors facemanufacturing challenges such as poor adhesion between the IC andcarriers, sidewall chipping, warpage, die shifting, and otherreliability issues.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A to FIG. 1K are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure.

FIG. 2 is a schematic enlarged top view illustrating a part of thestructure depicted in FIG. 1C.

FIG. 3 is a schematic enlarged cross-sectional view illustrating a partof the structure depicted in FIG. 1D.

FIG. 4 is a schematic enlarged cross-sectional view illustrating a partof the structure depicted in FIG. 1D.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components, values, operations, materials,arrangements, or the like, are described below to simplify thedisclosure. These are, of course, merely examples and are not intendedto be limiting. Other components, values, operations, materials,arrangements, or the like, are contemplated. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In addition, terms, such as “first,” “second,” “third,” and the like,may be used herein for ease of description to describe similar ordifferent element(s) or feature(s) as illustrated in the figures, andmay be used interchangeably depending on the order of the presence orthe contexts of the description.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIG. 1A to FIG. 1K are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure. FIG. 2 is a schematic enlargedtop view illustrating a part of the structure depicted in FIG. 1C, whereFIG. 2 shows the enlarged cross-sectional view of the dotted box Aindicated in FIG. 1C. FIG. 3 is a schematic enlarged top viewillustrating a part of the structure depicted in FIG. 1D, where FIG. 3shows the enlarged top view of the dotted box B indicated in FIG. 1D.FIG. 4 is a schematic enlarged cross-sectional view illustrating a partof the structure depicted in FIG. 1D, where FIG. 4 shows the enlargedcross-sectional view of the dot-dashed box C indicated in FIG. 1D.

Referring to FIG. 1A, a temporary carrier 50 is provided. In someembodiments, the temporary carrier 50 may include any suitable materialthat could provide structural support during processing. For example,the temporary carrier 50 includes metal (e.g., steel), glass, ceramic,silicon (e.g., bulk silicon), combinations thereof, multi-layersthereof, or the like. In some embodiments, a release layer 52 may beformed on the temporary carrier 50. The material of the release layer 52may be any material suitable for bonding and de-bonding the temporarycarrier 50 from the structure formed thereon. For example, the releaselayer 52 includes a layer of light-to-heat-conversion (LTHC) releasecoating and a layer of associated adhesive (such as a ultra-violetcurable adhesive or a heat curable adhesive layer), or the like.

Referring to FIG. 1B and FIG. 1C, a first redistribution structure 100is formed on the temporary carrier 50 and a conductive connector 200 maybe formed on the first redistribution structure 100. The firstredistribution structure 100 may include a first dielectric layer 110and a first patterned conductive layer 120 stacked alternately. In someembodiments, one or more layers of dielectric materials may berepresented collectively as the first dielectric layer 110, andconductive features (e.g. conductive lines, conductive pads, and/orconductive vias) are collectively represented as the first patternedconductive layer 120. The first redistribution structure 100 may bereferred to as a backside redistribution structure given its placementin the structure.

For example, the first dielectric layer 110 may be formed of anysuitable material, such as polybenzoxazole (PBO), polyimide (PI),benzocyclobutene (BCB), or other material that is electricallyinsulating. According to some embodiments, the first dielectric layer110 may be formed using any suitable method, such as a spin-on coatingprocess, a deposition process, and the like.

In some embodiments, to facilitate the formation of the first patternedconductive layer 120, a seed layer (not shown) may be first formed onthe first dielectric layer 110 using a deposition process, or othersuitable method. For example, the seed layer is a conductive layer,which may be a single layer or a composite layer including severalsub-layers formed of different materials. In some embodiments, the seedlayer includes a titanium layer and a copper layer over the titaniumlayer and may be formed using a deposition process, or other suitableprocess. Then, a mask material may be formed and patterned on the seedlayer to form a mask pattern (not shown) using a spin coating process,an etching process, or other suitable processes. The mask pattern mayinclude a plurality of openings exposing the underlying seed layer. Forexample, the material of the mask pattern may include a positivephotoresist or a negative photo-resist, but not limited thereto. Next, aconductive material including copper, copper alloy, aluminum, aluminumalloy, or combinations thereof, may be formed in the openings of themask pattern and on the exposed portions of the seed layer using, forexample, a sputtering process, a plating process, or other suitableprocess. Subsequently, the mask pattern and portions of the seed layeron which the conductive material is not formed may be removed. Forexample, the mask pattern may be removed using stripping process, orother acceptable removing process. After removing the mask pattern, theexposed portions of the seed layer are removed using, such as wet or dryetching process, or other acceptable removing process. The remainingportions of the seed layer and conductive material form the firstpatterned conductive layer 120 as shown in FIG. 1B.

In some embodiments, the first redistribution structure 100 includesmore than one of the first dielectric layer 110 stacked on the firstpatterned conductive layer 120. For example, a layer of the dielectricmaterial may be formed over the first patterned conductive layer 120.Then, a portion of the dielectric material may be removed to form thefirst dielectric layer 110 using, for example, lithography and etchingprocess, or other suitable methods. In other words, the first dielectriclayer 110 may include a plurality of openings exposing portions of thefirst patterned conductive layer 120 for further electrical connection.In some embodiments, the abovementioned steps may be performed multipletimes to obtain a multi-layered redistribution structure as required bythe circuit design. That is, the numbers of the first dielectric layer110 and the first patterned conductive layer 120 can be selected basedon demand and are not limited in the disclosure. In other embodiments,the first patterned conductive layer 120 may be formed before formingthe first dielectric layer 110. It should be noted that the formingsequence of the first dielectric layer 110 and the first patternedconductive layer 120 depends on the design requirement and construe nolimitation in the disclosure.

Continued on FIG. 1C, in some embodiments, a conductive material may beformed in the openings of the first dielectric layer 110 to connect thefirst patterned conductive layer 120 and further protrude on the firstdielectric layer 110, thereby forming the conductive connectors 200. Thematerial of the conductive connector 200 may be the same or similar withthat of the first patterned conductive layer 120. According to someembodiments, the conductive connectors 200 may be formed byphotolithography, plating, photoresist stripping processes, or any othersuitable method. For example, the conductive connectors 200 may beformed by forming a mask pattern having openings (not shown), where themask pattern covers a portion of the first redistribution structure 100and exposes another portion of the first patterned conductive layer 120with the openings; forming a metallic material to fill the openings soas to form the conductive connector 200 by electroplating or deposition;and then removing the mask pattern. In certain embodiments, theconductive connectors 200 are through integrated fan-out (InFO) vias.

In some embodiments, the first redistribution structure 100 includes adie attach region DR and a peripheral region PR connected to the dieattach region DR. The conductive connectors 200 may be formed in theperipheral region PR of the first redistribution structure 100. Thefirst patterned conductive layer 120 may be formed in the peripheralregion PR and/or die attach region DR. In some embodiments, at least aportion of the first patterned conductive layer 120 are formed in thedie attach region DR.

The first redistribution structure 100 may have a first surface 100 afacing towards the temporary carrier 50 and a second surface 100 bopposite to the first surface 100 a. Referring to FIG. 1C and FIG. 2,the second surface 100 b of the first redistribution structure 100 maybe uneven and roughed due to material characteristics and the formationof the first patterned conductive layer 120. In some embodiments, thefirst redistribution structure 100 may be referred to as a patternedstructure. For example, the top surface of the top layer of the firstdielectric layer 110 may include concave areas 110 a corresponding tothe space of the underlying first patterned conductive layer 120, suchthat the concave areas 110 a may cause the second surface 100 b to beuneven. That is, the concave areas 110 a may be formed between adjacentpatterns. In some embodiments, at least a portion of the first patternedconductive layer 120 is formed in the die attach region DR so that theconcave areas 110 a are introduced in the die attach region DR, therebycausing the second surface 100 b in the die attach region DR uneven. Assurface roughness is known that provides a measure of the unevenness ofthe surface height. For example, the average surface roughness of thesecond surface 100 b may be in the range of about 0.1 μm to about 1 μm.In some embodiments, the surface roughness in the die attach region DRmay range from about 1 μm to about 15 μm due to the underlying patternedconductive layers. It should be appreciated that the illustration of theconcave areas 110 a is schematic and is not in scale.

Referring to FIG. 1D, a semiconductor die 300 is provided and disposedon the first redistribution structure 100 using, for example, a pick andplace technique, or other suitable method. In some embodiments, thesemiconductor die 300 is manufactured through a front end of line (FEOL)process, but is not limited thereto. In some embodiments, thesemiconductor die 300 includes a semiconductor substrate 310, aplurality of connecting pads 320, a plurality of connecting pillars 330and a protection layer 340. In one embodiment, the semiconductorsubstrate 310 may be a silicon substrate including active components(e.g., diodes, transistors or the like) and passive components (e.g.,resistors, capacitors, inductors or the like) formed therein. In oneembodiment, the connecting pads 320 may be made of aluminum or alloysthereof, or the like. In some embodiments, the semiconductor die 300 mayinclude an interconnection structure (not shown) disposed between thesemiconductor substrate 310 and the connecting pads 320, where theconnecting pads 320 physically contact the interconnection structure.

In some embodiments, the connecting pillars 330 are respectivelydisposed on and electrically connected to the connecting pads 320, wherethe connecting pillars 330 physically contact the connecting pads 320.In one embodiment, the connecting pillars 330 may include copperpillars, copper alloy pillars, or other suitable metal pillars. In someembodiments, the connecting pillars 330 may include lead-based materialsor lead-free materials with or without additional impurity formed on thetop, but is not limited thereto. In some embodiments, the protectionlayer 340 covers the connecting pads 320, and the connecting pillars330. That is, the protection layer 340 prevents any possible damage(s)occurring on the surfaces of the connecting pillar 330 during thetransfer of the semiconductor die 300. In one embodiment, the protectionlayer 340 may be made of a polybenzoxazole (PBO) layer, a polyimide (PI)layer, or suitable polymers or inorganic materials. In some embodiments,the protection layer 340 may further act as a passivation layer forproviding better planarization and evenness. The numbers of theconnecting pads 320 and the connecting pillars 330 can be selected basedon demand and are not limited in the disclosure. It should beappreciated that the illustration of the semiconductor die 300 and othercomponents throughout all figures is schematic and is not in scale.

For example, the semiconductor die 300 may include digital die, analogdie or mixed signal die, such as application-specific integrated circuit(ASIC) die, logic die, sensor die, but is not limited thereto. Notethat, as shown in FIG. 1D, only one semiconductor die 300 is presentedfor illustrative purposes; however, it should be noted that the numberof the semiconductor die can be one or more than one, the disclosure isnot limited thereto. In certain embodiments, additional semiconductordie(s) may be provided, and the additional semiconductor die(s) and thesemiconductor die 300 may be the same type or different types.

The semiconductor die 300 includes a rear surface 300 r, a sidewall 300s connected to the rear surface 300 r, and a bottom edge 300 e(illustrated in FIG. 2) is between the rear surface 300 r and thesidewall 300 s. Continued on FIG. 1D, a rear surface 300 r of thesemiconductor die 300 is attached to the first redistribution structure100 through a die attach material 400. In some embodiments, the dieattach material 400 may function as an adhesive mechanism to adhere thesemiconductor die 300 to the first redistribution structure 100. Forexample, the die attach material 400 may be attached to the rear surface300 r of the semiconductor die 300 before placing the semiconductor die300 on the first redistribution structure 100. In some embodiments,before placing the semiconductor die 300 on the first redistributionstructure 100, the die attach material 400 on the rear surface 300 r ofthe semiconductor die 300 may include a thickness ranging about 10 μm toabout 40 μm. The die attach material 400 may have a similar dimensionand/or shape to the semiconductor die 300. Alternatively, the die attachmaterial 400 may include other dimensions and shapes. In someembodiments, the die attach material 400 include a polymer,thermoplastic material (e.g. epoxy resin, phenol resin, etc.), or thelike that functions as an adhesive. For example, the die attach material400 may be a die attached film (DAF), an adhesive bonding film (ABF), orthe like. Other suitable adhesive materials compatible withsemiconductor processing environments may be utilized. The die attachmaterial 400 may be a single film or a multi-layered film, but is notlimited thereto. In some embodiments, the die attach material 400 mayinclude pressure sensitive material and/or radiation sensitive material.For example, the die attach material 400 may become semi-liquid whensubjecting a pressure and/or a heat, and may become sticky to functionas an adhesive at elevated pressures and/or temperatures.

For example, during attaching the semiconductor die 300, thesemiconductor die 300 is pressed so that the die attach material 400 isextruded laterally out of the rear surface 300 r of the semiconductordie 300 and climbs upwardly to cover a sidewall 300 s of thesemiconductor die 300. In some embodiments, a process of applying atemperature to the die attach material 400 in the range of about 80° C.to about 200° C. is performed while the semiconductor die 300 is placedon the first redistribution structure 100 for a duration ranging fromabout 1 second to about 3 seconds. In some embodiments, the heatingoperation may be followed after the semiconductor die placement. Duringthe heating operation, the die attach material 400 may be softened. Forexample, the die attach material 400 may be exposed to UV radiationand/or heating to elevated temperatures so as to soften and/or activatethe adhesive properties of the die attach material 400. In someembodiments, the time taken for applying the temperature (e.g., fromabout 140° C. to about 200° C.) may range from 1 second to 3 secondsapproximately. In some embodiments, during attaching the semiconductordie 300, a process of applying a pressure to the die attach material 400in the range of about 0.5 MPA to about 3 MPA is performed for theduration ranging from 1 second to 3 seconds approximately. In someembodiments, a force exerted on the semiconductor die 300 is increasedin order to enhance the adhesion between the semiconductor die 300 andthe first redistribution structure 100. The elevated pressures and theelevated temperatures can be applied to the die attach material 400during the same process or applying separately, the disclosure is notlimited thereto.

When the die attach material 400 is returned to normal temperature andpressure, the die attach material 400 may return to a solid state andthe semiconductor die 300 can be securely adhered and positioned in thedie attach region DR of the first redistribution structure 100. In someembodiments, after attaching, the die attach material 400 may follow thecontour of the surface topography of the second surface 100 b of thefirst redistribution structure 100. For example, the processed dieattach material 400 may fill the concave areas 110 a on the secondsurface 100 b of the first redistribution structure 100. The presence ofvoids may create weak spots on reliability test and cause thesemiconductor die loosely attached. After processing to the die attachmaterial 400, the voids in the die attach material 400 may besubstantially eliminated, thereby improving the reliability and adhesionbetween the semiconductor die 300 and the first redistribution structure100. In some embodiments, after processing to the die attach material400, the interfacial adhesion between the die attach material 400 andthe second surface 100 b of the first redistribution structure 100 maybe improved by approximately 10% to 50%.

Referring to FIG. 1D, FIG. 3 and FIG. 4, in some embodiments, afterattaching the semiconductor die 300, the die attach material 400includes an extruded region ER surrounding the semiconductor die 300.For example, the extruded region ER of the die attach material 400 maybe the portion of the die attach material 400 which is not covered bythe rear surface 300 r of the semiconductor die 300. In someembodiments, a first shortest distance D1 from a midpoint of an bottomedge 300 e of the rear surface 300 r of the semiconductor die 300 to amidpoint of an bottom edge 400 e of the extruded region ER of the dieattach material 400 in a width direction of the semiconductor die 300 isgreater than a second shortest distance D2 between an endpoint of thebottom edge 300 e of the rear surface 300 r of the semiconductor die 300to an endpoint of the bottom edge 400 e of the extruded region ER of thedie attach material 400. In some embodiments, as the top plan view shownin FIG. 3, the boundary line of the die attach material 400 mayintersect with the boundary line of the semiconductor die 300. Forexample, the boundary line of the die attach material 400 may intersectwith the boundary line of at the vertices of the semiconductor die 300or the edges close to the vertices of the semiconductor die 300. Inother words, a small amount of the die attach material 400 is extrudedout at the corners of the semiconductor die 300 such that the corneredge of the semiconductor die 300 may be slightly covered or may not becovered by the die attach material 400.

In some embodiments, a width W of the extruded region ER of the dieattach material 400 decreases from the midpoint of the bottom edge 400 eof the extruded region ER to the endpoint of the bottom edge 400 e ofthe extruded region ER. In some embodiments, the width W of the extrudedregion ER may gradually decrease from the midpoint of the bottom edge400 e of the extruded region ER towards the both endpoints of the bottomedge 400 e of the extruded region ER. The width W (e.g., extruded amountof the die attach material 400) can be controlled by, for example,selecting suitable constituents and/or thickness of the die attachmaterial 400, adjusting the processing conditions (e.g., pressure,temperature and duration), and the like. In some embodiments, the widthW of the extruded region ER of the die attach material 400 may rangefrom about 5 μm to about 200 μm. In some embodiments, as shown in FIG.4, after attaching the semiconductor die 300, a covered distance D3 ofthe sidewall 300 s of the semiconductor die 300 covered by the extrudedregion ER of the die attach material 400 may range from about 5 μm toabout 200 μm.

Referring to FIG. 1E, an insulating encapsulant 500 is formed on thefirst redistribution structure 100 to encapsulate the semiconductor die100 and the die attach material 400. For example, the insulatingencapsulant 500 may be formed by an over-molding process followed by aplanarizing process. For example, the formation of the insulatingencapsulant 500 may include forming an insulating material (not shown)by over-molding to encapsulate the conductive connectors 200, thesemiconductor die 300 and the die attach material 400, and thenplanarizing insulating material, the conductive connectors 200, and thesemiconductor die 300 until the top surfaces of the connecting pillars330 and the protection layer 340 of the semiconductor die 300 and thetop surfaces 200 a of the conductive connectors 200 being exposed by theplanarized insulating material to form the insulating encapsulant 500.

That is, after the planarizing process, the protection layer 340 of thesemiconductor die 300 is partially removed to expose the connectingpillars 330 of the semiconductor die 300, and the insulating material ispartially removed to expose the top surfaces 200 a of the conductiveconnectors 200, and the top surfaces of the connecting pillars 330 andthe protection layer 340. In other words, as shown in FIG. 1E, the topsurfaces 200 a of the conductive connectors 200, the connecting pillars330 and the protection layer 340 are exposed by the top surface 500 a ofthe insulating encapsulant 500. The top surfaces of the connectingpillars 330 and the protection layer 340 may be referred to as an activesurface 300 a of the semiconductor die 300. In certain embodiments,after the planarization, the top surface 500 a of the insulatingencapsulant 500, the top surfaces 200 a of the conductive connectors200, and the active surface 300 a of the semiconductor die 300 becomesubstantially levelled with and coplanar to each other.

In other embodiments, the conductive connectors 200 may be formed afterforming the insulating material. For example, after forming the firstredistribution structure 100, then the semiconductor die 300 may bedisposed and attached on the first redistribution structure 100. Next,the insulating material is formed on the first redistribution structure100 to encapsulate the semiconductor die 300 and the die attach material400. Subsequently, a drilling process (e.g., a laser drilling, amechanical drilling, or other suitable process) may be performed on theinsulating material to form holes in the insulating material. Next, theconductive material may be filled in the holes of the insulatingmaterial. In some embodiments, the insulating material and theconductive material may be planarized such that the insulatingencapsulant 500 and the conductive connectors 200 are formed. In someembodiments, the conductive connectors 200 may be referred to as throughinsulating vias (TIVs).

In some embodiments, after forming the insulating encapsulant 500, aninclined interface S is formed between the insulating encapsulant 500and the die attach material 400. The inclined interface S may becoplanar with the surface of the extruded region ER. As thecross-sectional view depicted in FIG. 1E, the inclined interface S maybe nonlinear. For example, the inclined interface S may be aconvex-upward surface relative to the first redistribution structure 100in the cross section. In some embodiments, the curve which the inclinedinterface S intersects with the cross-section plane may be substantiallyconcave down toward the first redistribution structure 100 as depictedin FIG. 1E. In other embodiments, the inclined interface S may belinear, but is not limited thereto. Due to the presence of the extrudedregion ER of the die attach material 400, the maximum stress on thefirst redistribution structure 100 may shift from the semiconductor die300 side to the insulating encapsulant 500 side, thereby protecting thesemiconductor die 300 from being subjecting to excessive compressivestress (e.g., caused by CTE mismatch).

Referring to FIG. 1F, a second redistribution structure 600 is formed onthe insulating encapsulant 500. For example, the second redistributionstructure 600 may include a second dielectric layer 610 and a secondpatterned conductive layer 620 sequentially formed on the insulatingencapsulant 500, where the second patterned conductive layer 620 isconnected to the conductive connectors 200 and the connecting pillars330 of the semiconductor die 300. In some embodiments, the secondpatterned conductive layer 620 is electrically connected to the firstredistribution structure 100 through the conductive connectors 200.

In some embodiments, the second dielectric layer 620 is formed byforming a dielectric material (not shown) on the active surface 300 a ofthe semiconductor die 300, the top surfaces 200 a of the conductiveconnectors 200 and the top surface 500 a of the insulating encapsulant500, and patterning the dielectric material to form a plurality ofopenings (not marked) exposing the top surfaces 200 a of the conductiveconnectors 200 and portions of the active surface 300 a of thesemiconductor die 300 (e.g., the top surfaces of the connecting pillars330). Then, the second patterned conductive layer 620 is formed byforming a conductive material (not shown) on the second dielectric layer610, where the conductive material filling into the openings formed inthe second dielectric layer 610 to physically contact the top surfaces200 a of the conductive connectors 200 and the top surface of theconnecting pillars 330 of the semiconductor die 300. Subsequently,patterning the conductive material to form the second patternedconductive layer 620. It should be noted that the forming sequence ofthe second dielectric layer 610 and the second patterned conductivelayer 620 depends on the design requirement and construe no limitationin the disclosure. Due to the configuration of the second dielectriclayer 610 and the second patterned conductive layer 620, a routingfunction is provided to the package structure such that of the secondredistribution structure 600 is referred as a front side redistributionstructure. In certain embodiments, as the underlying insulatingencapsulant 500 provides better planarization and evenness, thelater-formed second redistribution structure 600 can be formed withuniform line-widths or even profiles, resulting in improved line/wiringreliability.

The formation of the second redistribution structure 600 includessequentially forming one or more second dielectric layers 610 and one ormore layers of second patterned conductive layers 620 in alternation. Incertain embodiments, the second patterned conductive layers 620 aresandwiched between the second dielectric layers 610, where the topsurface of the topmost layer of the second patterned conductive layers620 is exposed by a topmost layer of the second dielectric layers 610,and a bottom surface of the lowest layer of the second patternedconductive layers 620 is exposed by the lowest layer of the seconddielectric layers 610. In one embodiment, the top surface of the topmostlayer of the second patterned conductive layers 620 exposed by a topmostlayer of the second dielectric layers 610 may be connected to alater-formed component(s), and the bottom surface of the lowest layer ofthe second patterned conductive layers 620 exposed by the lowest layerof the second dielectric layers 610 is connected to an underlyingcomponent (e.g. the semiconductor die 300 and the conductive connectors200).

The material and the forming process of the second redistributionstructure 600 may be similar with that of the first redistributionstructure 100, and the detailed descriptions are omitted forsimplification. In some embodiments, as shown in FIG. 3, the secondredistribution structure 600 includes more than one dielectric layers610 and multiple second patterned conductive layers 620 stackedalternately; however, the disclosure is not limited thereto. The numbersof the second dielectric layer 610 and the second patterned conductivelayer 620 is not limited in this disclosure.

In some other embodiments, a plurality of pads (not marked) may beformed on some of the top surface of the topmost layer of the secondpatterned conductive layer 620 for electrically connecting with thelater-formed components. For example, the above-mentioned pads includeunder-ball metallurgy (UBM) patterns for ball mount and/or connectionpads for mounting of electronic components. In one embodiment, thematerial of the pads may include copper, nickel, titanium, tungsten, oralloys thereof or the like, and may be formed by an electroplatingprocess. The shape and number of the pads is not limited in thisdisclosure.

Referring to FIG. 1G, an electronic component 700 may be optionallydisposed on the second redistribution structure 600 to generate thedesired functional requirements. In some embodiments, the electroniccomponent 700 includes a surface mount component, integrated passivecomponent (e.g., resistors, capacitors, or the like), or the like.

Referring to FIG. 1H, a conductive terminal 800 may be formed on thesecond redistribution structure 600 for external electrical connection.In some embodiments, the conductive terminals 800 may be disposed on thesecond patterned conductive layer 620 of the second redistributionstructure 600 by a ball placement process, a plating process, or othersuitable processes. For example, the conductive terminals 800 includesolder balls, ball grid array (BGA) balls, or other terminals, but isnot limited thereto. Other possible forms and shapes of the conductiveterminals 800 may be utilized according to the design requirement. Insome embodiments, a soldering process and a reflow process may beoptionally performed for enhancement of the adhesion between theconductive terminals 800 and the second redistribution structure 600.

Referring to FIG. 1I, a plurality of conductive joints 70 is formed onthe first redistribution structure 100 opposite to the insulatingencapsulant 500. In some embodiments, after forming the electroniccomponent 700 and the conductive terminals 800, the temporary carrier 50and the release layer 52 are removed to expose the first surface 100 aof the first redistribution structure 100. For example, the temporarycarrier 50 is detached from the first redistribution structure 100through a de-bonding process. In some embodiments, the external energysuch as UV laser, visible light or heat, may be applied to the releaselayer 52 so that the first redistribution structure 100 and thetemporary carrier 50 can be separated. Subsequently, the structure maybe flipped (turned upside down) and placed on a holder 60 for subsequentprocesses formed on the first surface 100 a of the first redistributionstructure 100 as shown in FIG. 1I.

After removing the temporary carrier 50 and the release layer 52,forming a plurality of openings (not marked) on the first surface 100 aof the first redistribution structure 100. For example, the firstdielectric layer 110 is patterned to form openings exposing at least aportion of the first patterned conductive layer 120 using, for example,an etching process, a laser drilling process, or other suitable process.Next, the conductive joints 70 may be formed or dispensed in theopenings of the first dielectric layer 110. In some embodiments, theconductive joints 70 are made of solder materials (e.g., solder paste orthe like). In some embodiments, the conductive joints may be referred toas solder joints.

Referring to FIG. 1J and FIG. 1K, a semiconductor device 900 is providedand may be disposed on the first redistribution structure 100 oppositeto the insulating encapsulant 500. In some embodiments, through thefirst redistribution structure 100, the conductive connectors 200 andthe second redistribution structure 600, the semiconductor device 900 iselectrically connected to the semiconductor die 300.

In some embodiments, the semiconductor device 900 may be bonded to thefirst redistribution structure 100 with the conductive joints 70therebetween through flip chip bonding technology and/or surface mounttechnology. The disclosure is not limited thereto. For example, thesemiconductor device 900 may include digital chips, analog chips ormixed signal chips, such as application-specific integrated circuit(ASIC) chips, sensor chips, wireless and radio frequency (RF) chips,MEMS chips, CIS chips, pre-assembled packages, memory chips, logic chipsor voltage regulator chips. The disclosure is not limited thereto. Forexample, the semiconductor device 900 may include terminals 910. Theterminals 910 may be disposed and/or positioned on the conductive joints70. In some embodiments, a subsequent bonding process may be performedto bond the conductive joints 70 and terminals 910 of the semiconductordevice 900. For example, a reflow process may be performed such that aportion of the terminals 910 and/or the conductive joints 70 may meltduring the reflow process and form at least portions of the solderregions between the terminals 910 and the first redistribution structure100. Other suitable methods may be utilized to attach the semiconductordevice 900 onto the first redistribution structure 100. The disclosureis not limited thereto.

Continued on FIG. 1K, an underfill material 80 may be formed between thesemiconductor device 900 and the first surface 100 a of the firstredistribution structure 100 using, for example, a dispensing process,or other suitable method. In some embodiments, the underfill material 80at least fills the gaps between the conductive joints 80 and between thefirst redistribution structure 100, the semiconductor device 900 toprovide structural support and protection to the terminals 910 of thesemiconductor device 900. In some embodiments, the underfill material 80may be a molding compound including polymer material (e.g., epoxy,resin, and the like) either with or without fillers (e.g., silicafiller, glass filler, and the like), adhesion promoters, combinationsthereof, and the like.

After forming the underfill material 80, the conductive terminals 800may be released from the holder 60 to form a semiconductor package 10.For example, a dicing process is performed to form a plurality of thesemiconductor packages 10 into individual and separated semiconductorpackages 10. In one embodiment, the dicing process is wafer dicingprocess including mechanical blade sawing, laser cutting, or othersuitable method. In some embodiments, the semiconductor package 10 isplaced in the tray and ready to package out. Up to here, the manufactureof the semiconductor package 10 is completed.

According to some embodiments, a manufacturing method of a semiconductorpackage includes at least the following steps. A rear surface of asemiconductor die is attached to a patterned dielectric layer of a firstredistribution structure through a die attach material, where athickness (e.g., TK1 labeled in FIG. 4) of a portion of the die attachmaterial filling a gap between the rear surface of the semiconductor dieand a recessed area of the patterned dielectric layer is greater than athickness (e.g., TK2 labeled in FIG. 4) of another portion of the dieattach material interposed between the rear surface of the semiconductordie and a non-recessed area of the patterned dielectric layer. Aninsulating encapsulant is formed on the patterned dielectric layer ofthe first redistribution structure to cover the semiconductor die andthe die attach material. In some embodiments, A first interface (e.g.,IF1 labeled in FIG. 4) between the die attach material and the firstredistribution structure is rougher than a second interface (e.g., IF2labeled in FIG. 4) between the die attach material and a bottom of thesemiconductor die.

According to some embodiments, a manufacturing method of a semiconductorpackage includes at least the following steps. A patterned dielectriclayer is formed on conductive features to form a first redistributionstructure, where the patterned dielectric layer comprises a plurality ofopenings and a recessed area surrounded by the plurality of openings,and the patterned dielectric layer overlies a space of the conductivefeatures to form the recessed area. Each of a plurality of conductiveconnectors is formed on one of the plurality of openings of thepatterned dielectric layer to be in contact with the conductivefeatures. A semiconductor die is placed over the recessed area of thepatterned dielectric layer with a die attach material interposedtherebetween. The plurality of conductive connectors, the semiconductordie, and the die attach material are encapsulated with an insulatingencapsulant.

According to some embodiments, a manufacturing method of a semiconductorpackage includes at least the following steps. A first patterneddielectric layer is formed on a dielectric material to cover conductivefeatures. A semiconductor die is placed over the first patterneddielectric layer with a die attach material interposed therebetween. Thesemiconductor die is pressed toward the first patterned dielectric layerto extrude the die attach material beyond a bottom edge of thesemiconductor die, where in a top view, a width of an extruded portionof the die attach material increases from a vertex of the bottom edge ofthe semiconductor die toward a midpoint of the bottom edge of thesemiconductor die and decreases from the midpoint of the bottom edge ofthe semiconductor die to another vertex of the bottom edge of thesemiconductor die. An insulating encapsulant is formed on the firstpatterned dielectric layer to cover the semiconductor die and the dieattach material. A portion of the dielectric material is removed to forma second pattern dielectric layer having openings accessibly reveal atleast a portion of the conductive features. A semiconductor device isdisposed over the second pattern dielectric layer opposite to thesemiconductor die.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the disclosure.Those skilled in the art should appreciate that they may readily use thedisclosure as a basis for designing or modifying other processes andstructures for carrying out the same purposes and/or achieving the sameadvantages of the embodiments introduced herein. Those skilled in theart should also realize that such equivalent constructions do not departfrom the spirit and scope of the disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the disclosure.

What is claimed is:
 1. A manufacturing method of a semiconductorpackage, comprising: attaching a rear surface of a semiconductor die toa patterned dielectric layer of a first redistribution structure througha die attach material, wherein a thickness of a portion of the dieattach material filling a gap between the rear surface of thesemiconductor die and a recessed area of the patterned dielectric layeris greater than a thickness of another portion of the die attachmaterial interposed between the rear surface of the semiconductor dieand a non-recessed area of the patterned dielectric layer; and formingan insulating encapsulant on the patterned dielectric layer of the firstredistribution structure to cover the semiconductor die and the dieattach material.
 2. The manufacturing method of claim 1, furthercomprising: forming the patterned dielectric layer on conductivefeatures of the first redistribution structure before attaching thesemiconductor die to the first redistribution structure, wherein thepatterned dielectric layer overlies a space of the conductive featuresto form the recessed area.
 3. The manufacturing method of claim 1,further comprising: forming a plurality of conductive connectors on thepatterned dielectric layer to be in contact with conductive features ofthe first redistribution structure before attaching the semiconductordie to the first redistribution structure, wherein after attaching thesemiconductor die to the first redistribution structure, thesemiconductor die is surrounded by the plurality of conductiveconnectors.
 4. The manufacturing method of claim 3, further comprising:forming a second redistribution structure on the insulating encapsulant,the semiconductor die, and the plurality of conductive connectors,wherein the semiconductor die is electrically coupled to the firstredistribution structure through the second redistribution structure andthe plurality of conductive connectors.
 5. The manufacturing method ofclaim 1, wherein attaching the semiconductor die to the firstredistribution structure comprises: applying a pressure to the dieattach material in the range of about 0.5 MPA to about 3 MPA forapproximately 1 second to 3 seconds.
 6. The manufacturing method ofclaim 1, wherein attaching the semiconductor die to the firstredistribution structure comprises: applying a temperature to the dieattach material in the range of about 80° C. to about 200° C. for about1 second to about 3 seconds.
 7. The manufacturing method of claim 1,wherein forming the insulating encapsulant on the patterned dielectriclayer of the first redistribution structure comprises: forming aninsulating material on the patterned dielectric layer; and thinning theinsulating material until at least a portion of conductive bumps of thesemiconductor die is accessibly revealed by the insulating material. 8.A manufacturing method of a semiconductor package, comprising: forming apatterned dielectric layer on conductive features to form a firstredistribution structure, wherein the patterned dielectric layercomprises a plurality of openings and a recessed area surrounded by theplurality of openings, and the patterned dielectric layer overlies aspace of the conductive features to form the recessed area; forming eachof a plurality of conductive connectors on one of the plurality ofopenings of the patterned dielectric layer to be in contact with theconductive features; placing a semiconductor die over the recessed areaof the patterned dielectric layer with a die attach material interposedtherebetween; and encapsulating the plurality of conductive connectors,the semiconductor die, and the die attach material with an insulatingencapsulant.
 9. The manufacturing method of claim 8, wherein placing thesemiconductor die over the recessed area of the patterned dielectriclayer is performed after forming the plurality of conductive connectorson the patterned dielectric layer, and the semiconductor die issurrounded by the plurality of conductive connectors after placing thesemiconductor die.
 10. The manufacturing method of claim 8, furthercomprising: softening the die attach material by applying a heat to thedie attach material after placing the semiconductor die over thepatterned dielectric layer; and removing the heat from the die attachmaterial to solidify the die attach material.
 11. The manufacturingmethod of claim 10, further comprising: pressing the semiconductor dieto embed a bottom of the semiconductor die in the die attach materialwhen the die attach material is softened.
 12. The manufacturing methodof claim 11, further comprising: extruding a portion of the die attachmaterial beyond a bottom edge of the semiconductor die when pressing thesemiconductor die.
 13. The manufacturing method of claim 8, whereinencapsulating the plurality of conductive connectors, the semiconductordie, and the die attach material with the insulating encapsulantcomprises: forming an insulating material on the patterned dielectriclayer to cover the plurality of conductive connectors, the semiconductordie, and the die attach material; and thinning the insulating materialuntil at least a portion of the plurality of conductive connectors andat least a portion of conductive bumps of the semiconductor die areaccessibly revealed by the insulating material.
 14. The manufacturingmethod of claim 8, further comprising: forming a second redistributionstructure on the insulating encapsulant, the semiconductor die, and theplurality of conductive connectors, wherein the semiconductor die iselectrically coupled to the first redistribution structure through thesecond redistribution structure and the plurality of conductiveconnectors.
 15. A manufacturing method of a semiconductor package,comprising: forming a first patterned dielectric layer on a dielectricmaterial to cover conductive features; placing a semiconductor die overthe first patterned dielectric layer with a die attach materialinterposed therebetween; pressing the semiconductor die toward the firstpatterned dielectric layer to extrude the die attach material beyond abottom edge of the semiconductor die, wherein in a top view, a width ofan extruded portion of the die attach material increases from a vertexof the bottom edge of the semiconductor die toward a midpoint of thebottom edge of the semiconductor die and decreases from the midpoint ofthe bottom edge of the semiconductor die to another vertex of the bottomedge of the semiconductor die; forming an insulating encapsulant on thefirst patterned dielectric layer to cover the semiconductor die and thedie attach material; removing a portion of the dielectric material toform a second pattern dielectric layer having openings accessibly revealat least a portion of the conductive features; and disposing asemiconductor device over the second pattern dielectric layer oppositeto the semiconductor die.
 16. The manufacturing method of claim 15,wherein forming the first patterned dielectric layer on the dielectricmaterial to cover the conductive features comprises: depositing thedielectric material on a temporary carrier; forming the conductivefeatures on the dielectric material; and forming the first patterneddielectric layer on the dielectric material to cover the conductivefeatures, wherein the first patterned dielectric layer comprises aplurality of apertures accessibly revealing at least a portion of theconductive features, and the first patterned dielectric layer is indirect contact with the dielectric material in a space of the conductivefeatures to form a recessed area of the first patterned dielectriclayer.
 17. The manufacturing method of claim 16, further comprising:removing the temporary carrier to expose the dielectric material afterforming the insulating encapsulant on the first patterned dielectriclayer and before removing the portion of the dielectric material to formthe second pattern dielectric layer.
 18. The manufacturing method ofclaim 15, wherein pressing the semiconductor die toward the firstpatterned dielectric layer comprises: softening the die attach materialby applying a heat to the die attach material; pressing thesemiconductor die to embed a bottom portion of the semiconductor die inthe die attach material; and removing the heat from the die attachmaterial to solidify the die attach material.
 19. The manufacturingmethod of claim 15, wherein disposing the semiconductor device over thesecond pattern dielectric layer opposite to the semiconductor diecomprises: forming conductive joints in the openings of the secondpattern dielectric layer to couple the conductive features and thesemiconductor device.
 20. The manufacturing method of claim 15, whereinwhen pressing the semiconductor die, the die attach material is extrudedlaterally out of the bottom edge of the semiconductor die and climbsupwardly to cover a bottom sidewall of the semiconductor die.